Solution of Vacuum Problems Using Magnetic Mass Spectrometers

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Abstract
The evaluation of vacuum processes often requires the use of residual gas analyzers and when ease of operation, robust construction, and reliability are of importance, the magnetic deflection type of instrument can often be satisfactorily used. The use of a 180 ° mass spectrometer of 1.5-cm radius. is exampled in the monitoring of the oxygen partial pressure in an rf sputtering process. Information on the release of other gases during the sputtering process is also given. The influence of the pre-evacuation cycle on the gas atmosphere in a Penning pump system has been investigated using a 7.5 cm radius 60 ° sector field instrument with fast scanning capabilities. The same instrument has also enabled information to be obtained on the outgassing products from certain plastic materials when heated in vacuum. The decomposition of diffusion pump oils at elevated temperatures has been studied using a larger 60 ° spectrometer of 15 cm radius.

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