Sputter-induced modification of alloy composition in near-surface regions
- 1 November 1980
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 73 (1) , 139-143
- https://doi.org/10.1016/0040-6090(80)90340-5
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
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- Preferential sputtering of Cu-Ni alloys at low temperature using lower energy auger electron spectra∗Surface Science, 1979
- Quantitative AES analysis of coevaporated Cu/Ni films and the effects of ion sputtering on them: experiments at liquid nitrogen and room temperatureJournal of Vacuum Science and Technology, 1978
- Effects of enhanced diffusion on preferred sputtering of homogeneous alloy surfacesSurface Science, 1978
- Determination of the surface composition of the Cu−Ni alloys for clean and adsorbate−covered surfacesJournal of Vacuum Science and Technology, 1975
- Alloy Sputtering Studies with in situ Auger Electron SpectroscopyJournal of Applied Physics, 1971