Projection patterned Si doping of GaAs in ambient SiH4 gas by a KrF excimer laser
- 1 November 1988
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B
- Vol. 6 (6) , 1694-1697
- https://doi.org/10.1116/1.584163
Abstract
No abstract availableThis publication has 0 references indexed in Scilit: