Chemical vapor deposition of thin semiconductor films for solar energy conversion
- 1 December 1976
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 39, 87-94
- https://doi.org/10.1016/0040-6090(76)90626-x
Abstract
No abstract availableThis publication has 2 references indexed in Scilit:
- Thick semiconductor films for photothermal solar energy conversionJournal of Vacuum Science and Technology, 1975
- Silicon Oxynitride Films from the NO-NH[sub 3]-SiH[sub 4] ReactionJournal of the Electrochemical Society, 1973