Analytical Solution of Another Ellipsometric Inverse Problem

Publisher Website
Google Scholar
Abstract
An analytical solution is given that allows one to obtain the depth of an arbitrary layer from the measured ellipsometric parameters ψ and Δ of an arbitrary plane-parallel isotropic layered structure if all the refractive indexes and the depths of the rest layers are known. An analysis of the relative errors is given.

This publication has 0 references indexed in Scilit: