Integrated stylus-force gauge
- 30 June 1990
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 22 (1) , 410-413
- https://doi.org/10.1016/0924-4247(89)80004-4
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Polycrystalline silicon strain sensorsSensors and Actuators, 1985
- Low-cost pressure/force transducer with silicon thin film strain gaugesSensors and Actuators, 1983
- Silicon nitride single-layer x-ray maskJournal of Vacuum Science and Technology, 1982