Nondestructive Method for Revealing Stacking Faults in Epitaxial Silicon
- 1 April 1964
- journal article
- conference paper
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 35 (4) , 1360-1361
- https://doi.org/10.1063/1.1713630
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
- Microplasma breakdown at stair-rod dislocations in siliconPhilosophical Magazine, 1963
- Crystallographic Imperfections in Epitaxially Grown SiliconJournal of Applied Physics, 1962
- Stacking Faults in Epitaxial SiliconJournal of Applied Physics, 1962
- Application à la métallographie des méthodes interférentielles à deux ondes polariséesRevue de Métallurgie, 1955