Flow-Tube Kinetics of Gas-Phase Chemical Vapor Deposition Reactions: TiN from Ti(NMe2)4 and NH3
- 1 March 1994
- journal article
- Published by American Chemical Society (ACS) in Chemistry of Materials
- Vol. 6 (3) , 260-261
- https://doi.org/10.1021/cm00039a002
Abstract
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