Suppression of Acid Diffusion in Chemical Amplification Resists by Molecular Control of Base Matrix Polymers
- 30 December 1995
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 34 (Part 1, No) , 6786-6793
- https://doi.org/10.1143/jjap.34.6786
Abstract
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