Effects of Axial Magnetic Field and Faraday Shield on Characteristics of RF Produced Plasma Using Spiral Antenna
- 1 August 1996
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 35 (8R)
- https://doi.org/10.1143/jjap.35.4503
Abstract
Influences of the axial magnetic field and Faraday shield on the performance of RF produced plasma using a spiral antenna are investigated. The RF power and filling pressure dependences, antenna-plasma coupling, Ar line intensities and spatial profiles of plasma parameters are studied. With the magnetic field and/or without a Faraday shield, the threshold input power for plasma initiation is lowered and the antenna-plasma coupling is improved. In addition, a collisionless heating mechanism is suggested. With the increase in the applied magnetic field, the ion saturation current increases and shows a peaked radial profile; in the low-pressure range it shows a nearly flat axial profile.Keywords
This publication has 13 references indexed in Scilit:
- Dynamic Formation of Excited Helicon Wave Structure and Estimation of Wave Energy Flux DistributionJapanese Journal of Applied Physics, 1996
- Estimation of Electric Fields from Magnetic Field Distributions and an Application to Helicon WaveJapanese Journal of Applied Physics, 1995
- Dynamic plasma behaviour excited by m=+or-1 helicon wavePlasma Physics and Controlled Fusion, 1995
- Role of Helicon Waves on High-Density Plasma ProductionJapanese Journal of Applied Physics, 1994
- Free Radicals in an Inductively Coupled Etching PlasmaJapanese Journal of Applied Physics, 1994
- Collisionless electron heating in an inductively coupled dischargePhysical Review Letters, 1993
- Plasma production by helicon wavesPlasma Sources Science and Technology, 1993
- Review of inductively coupled plasmas for plasma processingPlasma Sources Science and Technology, 1992
- Plasma ionization by helicon wavesPlasma Physics and Controlled Fusion, 1991
- Very efficient plasma generation by whistler waves near the lower hybrid frequencyPlasma Physics and Controlled Fusion, 1984