Effects of wavelength, deposition rate and thickness on laser ablation deposited YSZ films on Si(100)

This publication has 6 references indexed in Scilit:

• ArF and KrF excimer laser deposition of yttria-stabilized zirconia on Si(100)
  Applied Physics Letters, 1996
• Heteroepitaxial Growth of Yttria-Stabilized Zirconia Film on Silicon by Reactive Sputtering
  Japanese Journal of Applied Physics, 1995
• YBa2Cu3O7−δ films on Si with Y-stabilized ZrO2 and Y2O3 buffer layers: High-resolution electron microscopy of the interfaces
  Applied Physics Letters, 1992
• Epitaxial growth of monoclinic and cubic ZrO2 on Si(100) without prior removal of the native SiO2
  Thin Solid Films, 1992
• Preparation and growth of YSZ buffer layers and YBa2Cu3O7 - films on silicon (100)
  Physica C: Superconductivity and its Applications, 1991
• Epitaxial yttria-stabilized zirconia on hydrogen-terminated Si by pulsed laser deposition
  Applied Physics Letters, 1990