Novel, Organic Acid‐Based Etchants for InGaAlAs / InP Heterostructure Devices with AlAs Etch‐Stop Layers

1 August 1992

journal article
Published by The Electrochemical Society in Journal of the Electrochemical Society

Vol. 139 (8) , 2306-2309
https://doi.org/10.1149/1.2221220

Abstract

The industrial extraction of cerium and other rare earths from monazite sand is reviewed briefly, and the principal uses of the rare earths are discussed.

Keywords

ETCHING
LAYERS
HYDROGEN
HYDROGEN PEROXIDE
INDIUM