A study of defects in sputtered TiN coatings by electrochemical polarization

• 1 November 1986
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology A
• Vol. 4  (6) , 2911-2914
• https://doi.org/10.1116/1.573659

Abstract

Keywords

• SPUTTERED TIN
• ELECTROCHEMICAL POLARIZATION
• TIN COATINGS
• STUDY OF DEFECTS