Cold cathode field emitter array on a quadrupole mass spectrometer: Route to miniaturization
- 1 September 1999
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 17 (5) , 1993-1996
- https://doi.org/10.1116/1.590859
Abstract
We have improved the quadrupole mass spectrometer by substituting the conventional hot filament electron source by a field emitter array (FEA). Elimination of the hot filament avoids a number of common problems, including thermal cracking of delicate molecules, outgassing of the filament itself and nearby components, high power requirements for the filament, large size, stray light, stray magnetic fields, contamination by thoria and tungsten, and a long warm-up time. The advantages are clearest for portable applications where power requirements dominate. Here, the power savings are not just in eliminating the filament supply, but more important in reducing the largest component of the system, the vacuum pump. This comes about because the filament is the primary gas load and because chemical reactions taking place on it require fast pumping to keep the products from interfering with the spectra. Comparison between hot filament and cold cathode FEA ionization is made using a quadrupole mass spectrometer fitted with both electron sources, independently controlled. The FEA advantage is strongest when the ultrahigh vacuum system is throttled to a low pumping speed, mimicking a portable system with a small pump. FEAs also enable miniaturization and a corresponding decrease in pump size. Moreover, with miniaturization, shorter mean free paths and consequently higher working pressures can be tolerated further decreasing pump requirements.Keywords
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