Experimental and calculational study on diamond growth by an advanced hot filament chemical vapor deposition method
- 15 July 1992
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 72 (2) , 705-711
- https://doi.org/10.1063/1.351856
Abstract
An advanced hot filament chemical vapor deposition (AHF‐CVD), which enables independent control of CVD parameters, was performed to investigate the effect of each CVD parameter upon diamond growth. The simple configuration of this AHF‐CVD system allows modeling as a one‐dimensional plug flow reactor. Gas‐phase chemical reactions were modeled by taking into account the temperature distribution between the filament and the substrate, to assess the role of such chemical species as hydrogen atom and methyl radical, in diamond growth. From a comparison between the experimental and calculated results, it was strongly suggested that the methyl radical is a promising diamond precursor in a system using CH4‐H2 as the source gas, and that a well‐crystallized diamond would be deposited under the conditions of a large proportion of hydrogen atoms with respect to the precursor.This publication has 18 references indexed in Scilit:
- An investigation of product distributions in microwave plasma for diamond growthJournal of Applied Physics, 1991
- Methyl versus acetylene as diamond growth speciesJournal of Materials Research, 1990
- A study of gas chemistry during hot-filament vapor deposition of diamond films using methane/hydrogen and acetylene/hydrogen gas mixturesJournal of Applied Physics, 1990
- Role of heat transfer and fluid flow in the chemical vapor deposition of diamondJournal of Applied Physics, 1990
- Methyl radical and H-atom concentrations during diamond growthJournal of Applied Physics, 1990
- The role of hydrogen in vapor deposition of diamondJournal of Applied Physics, 1989
- Gas-phase kinetics during diamond growth: CH4 as-growth speciesJournal of Applied Physics, 1989
- Hydrogen atom detection in the filament-assisted diamond deposition environmentApplied Physics Letters, 1989
- Measurement of stable species present during filament-assisted diamond growthApplied Physics Letters, 1988
- Infrared detection of gaseous species during the filament-assisted growth of diamondApplied Physics Letters, 1988