Grain Growth Studies in Polysilicon by AR40 Ion Implantation and Thermal Annealing

• 1 September 1984
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 131  (9) , 2143-2145
• https://doi.org/10.1149/1.2116037

Abstract

Keywords

• THERMAL ANNEALING
• GRAIN GROWTH
• ION IMPLANTATION