The effect of intensity distribution in the reflected beam on the detection error of monochromatic optical autofocus systems
- 1 May 1990
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B
- Vol. 8 (3) , 456-462
- https://doi.org/10.1116/1.585044
Abstract
No abstract availableThis publication has 0 references indexed in Scilit: