Two-modulator generalized ellipsometry: experiment and calibration

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Abstract
A two-modulator generalized ellipsometer is described that is capable of measuring all 16 elements of a sample Mueller matrix with four measurements made at different azimuthal orientations of the polarization state generator and polarization state detector. If the sample can be described with a Mueller–Jones matrix, only a single measurement is needed. Only two calibration steps are needed to determine the fundamental operating parameters of the instrument. A reflection measurement from silicon is presented as an example, which illustrates that the elements of the Mueller–Jones matrix can be measured to an accuracy of ∼0.1–0.2%.