Epitaxial Deposition of Niobium Nitride by Sputtering

• 1 January 1974
• journal article
• Published by IOP Publishing in Japanese Journal of Applied Physics
• Vol. 13  (S1) , 613
• https://doi.org/10.7567/jjaps.2s1.613

Abstract

Keywords

• EPITAXIAL DEPOSITION
• NITRIDE BY SPUTTERING
• DEPOSITION OF NIOBIUM NITRIDE