Local annealing of complex mechanical devices: a new approach for developing monolithic micro-devices
- 14 December 1999
- journal article
- Published by Elsevier in Materials Science and Engineering: A
- Vol. 273-275, 795-798
- https://doi.org/10.1016/s0921-5093(99)00418-9
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- A Concept for Monolithic Shape Memory Alloy Micro-DevicesJournal de Physique IV, 1997