Hydrogen formation in silane oxidation
- 1 March 1985
- journal article
- Published by Springer Nature in Reaction Kinetics and Catalysis Letters
- Vol. 29 (1) , 9-14
- https://doi.org/10.1007/bf02067942
Abstract
No abstract availableThis publication has 3 references indexed in Scilit:
- Gas Phase Composition in the Low Pressure Chemical Vapor Deposition of Silicon DioxideJournal of the Electrochemical Society, 1980
- Mechanism of silane oxidationReaction Kinetics and Catalysis Letters, 1980
- Films from the Low Temperature Oxidation of SilaneJournal of the Electrochemical Society, 1979