Vibrating silicon diaphragm micromechanical gyroscope
- 31 August 1995
- journal article
- Published by Institution of Engineering and Technology (IET) in Electronics Letters
- Vol. 31 (18) , 1567-1568
- https://doi.org/10.1049/el:19951070
Abstract
The design and operation of a micromechanical gyroscope based on a vibrating diaphragm loaded with an inertial mass is described. Capacitive actuation and sensing methods are employed. Preliminary results are presented which show that mechanical and electrical coupling limit current performance, which could be improved to give a noise equivalent rate of turn better than 0.14°/s.Keywords
This publication has 1 reference indexed in Scilit:
- A micromachined comb-drive tuning fork rate gyroscopePublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002