Production of High-Energy Neutral Atoms by Scattering of Ions at Solid Surfaces and Its Relation to Sputtering
- 21 October 1968
- journal article
- research article
- Published by American Physical Society (APS) in Physical Review Letters
- Vol. 21 (17) , 1224-1226
- https://doi.org/10.1103/physrevlett.21.1224
Abstract
Experiments performed with an rf-induced gas discharge demonstrate the existence of neutral atoms with sufficient energy to cause secondary emission of electrons. Evidence is presented that these energetic neutrals are produced by ion neutralization and reflection at the target electrode surface.Keywords
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