A new method for preparing plan-view TEM specimen of multilayered films using focused ion beam.
- 1 October 2004
- journal article
- research article
- Published by Oxford University Press (OUP) in Journal of Electron Microscopy
- Vol. 53 (5) , 501-504
- https://doi.org/10.1093/jmicro/dfh065
Abstract
A new method is proposed for preparing plan-view specimens of a CeO2/Gd2Zr2O7 multilayer on a metal substrate using focused ion beam milling. In the plan-view specimen, a membrane from the surface region of the CeO2 to the Gd2Zr2O7 layer was thinned to electron transparence so that the entire span of the multilayer can be observed in a single sample. The in-plane alignments of the CeO2 layer and the Gd2Zr2O7 layer were analysed using selected-area diffraction patterns (SADPs). The boundaries between the CeO2 grains were also examined using SADPs.Keywords
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