Generation of large volume microwave plasmas
- 1 July 1973
- journal article
- Published by IOP Publishing in Journal of Physics E: Scientific Instruments
- Vol. 6 (7) , 628-630
- https://doi.org/10.1088/0022-3735/6/7/013
Abstract
A new technology for producing large volume microwave plasmas is introduced, Microwave energy is coupled into the plasma by means of a slow wave structure, and plasma volumes well in excess of 1000 cm3 can readily be achieved with 2.5 kW of microwave power at 2.45 GHz. General operating characteristics and some experimental data are presented.Keywords
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