Photoenhanced dissolution and diffusion of Ag in As2Sx layers
- 1 February 1987
- journal article
- Published by Elsevier in Journal of Non-Crystalline Solids
- Vol. 90 (1-3) , 517-520
- https://doi.org/10.1016/s0022-3093(87)80476-3
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- Inorganic Resists Based On Photo-Doped As-S FilmsPublished by SPIE-Intl Soc Optical Eng ,1985