Use of Simultaneous Vaporizing of Two Substances to Obtain Thin Films
- 1 January 1967
- journal article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 38 (1) , 77-78
- https://doi.org/10.1063/1.1720533
Abstract
An apparatus for depositing thin layers of two substances in a given ratio is described. It consists of a servomechanism which controls the rate of vaporization of one of the substances with respect to the other. The performance of the installation is evaluated.Keywords
This publication has 0 references indexed in Scilit: