Problems Encountered During Deposition of Optical Thin Films with Reproducible Characteristics in an Automatic Coater

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Abstract
Investigations have shown that it is possible to control optical layers with high precision by means of a quartz crystal monitor (measurement of the deposited mass). This was possible by using a very precise quartz crystal monitor and by a thorough investigation of the phenomena of condensation on the substrate and also of the effect caused by interaction of residual gas on the film during the deposition process. On the basis of this experience a fully automatic control unit has been developed which may be used for the production of optical layers as well as for electronic applications.

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