Synthesis and evaluation of copolymers of (tert-butoxycarbonyloxy)styrene and (2-nitrobenzyl)styrene sulfonates: single-component chemically amplified deep-UV imaging materials
- 1 July 1992
- journal article
- Published by American Chemical Society (ACS) in Chemistry of Materials
- Vol. 4 (4) , 837-842
- https://doi.org/10.1021/cm00022a018
Abstract
No abstract availableThis publication has 0 references indexed in Scilit: