GaInAs/GaAs quantum wire laser structures with stronggaincoupling defined by reactive ion etching

Abstract
Gain-coupled GaInAs/GaAs quantum wire lasers have been realised with wire widths down to 70 nm by low-damage dry etching. Very strong gain modulation has been achieved by etching through the active layers. The optically pumped laser structures show singlemode operation at 77 K.