Reactions of laser-generated free radicals in silicon deposition processes

This publication has 42 references indexed in Scilit:

• Infrared double-resonance lineshapes in strongly pumped spherical-top molecules
  Spectrochimica Acta Part A: Molecular Spectroscopy, 1989
• Multiple pathways for the direct formation of SiH₂from the photodissociation of ethylsilane
  Molecular Physics, 1989
• Information theoretic analysis of quantal fluctuations in fluorescence lifetimes
  The Journal of Physical Chemistry, 1988
• The decomposition of alkyl silanes (SiMenH4−n, 0≤n≤4) on Ni(100)
  Journal of Vacuum Science & Technology A, 1988
• Reactions of organosilanes initiated by infrared multiple photon excitation
  Spectrochimica Acta Part A: Molecular Spectroscopy, 1987
• Mechanistic Studies of Chemical Vapor Deposition
  Annual Review of Physical Chemistry, 1987
• Theoretical Studies of Silicon Chemistry
  Annual Review of Physical Chemistry, 1987
• Infrared photochemistry of alkyl- and arylsilanes
  The Journal of Physical Chemistry, 1984
• Kinetics of the high-temperature thermal decomposition of silanes and alkylsilanes
  Organometallics, 1983
• Laser Microchemistry and its Application to Electron-Device Fabrication
  Annual Review of Physical Chemistry, 1983