Physical vapour deposition techniques for the growth of YBa2Cu3O7thin films
- 1 January 1990
- journal article
- Published by IOP Publishing in Superconductor Science and Technology
- Vol. 3 (1) , 38-52
- https://doi.org/10.1088/0953-2048/3/1/006
Abstract
The growth and characterisation of YBa2Cu3O7 thin films are reviewed. The discussion of growth is limited to the physical vapour deposition techniques of laser ablation, sputtering and evaporation. Emphasis is placed on the practical problems of growing epitaxial films in situ and characterising them.Keywords
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