Application of Reflection Coefficient Dip to Layer Thickness Measurement by Acoustic Microscope
- 1 January 1985
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 24 (S1)
- https://doi.org/10.7567/jjaps.24s1.190
Abstract
A new method of layer thickness measurement appropriate for the electroplating process is proposed using a reflection acoustic microscope. This method is an application of the phenomenon that a reflection coefficient takes a dip-like minimum as a function of wave frequency, layer thickness and incident angle. The dip-like minimum is understood due to the excitation of pseudo Sezawa mode by investigating the dispersion relation of a surface acoustic wave.Keywords
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