Near-Surface Reactions of Gold and Silver in Silicon

• 1 October 1993
• journal article
• Published by Trans Tech Publications, Ltd. in Materials Science Forum
• Vol. 143-147, 111-116
• https://doi.org/10.4028/www.scientific.net/msf.143-147.111

Abstract

Keywords

• DEFECT REACTIONS
• HYDROGEN PASSIVATION
• NOBLE METALS
• SILICON
• WET CHEMICAL ETCHING