Ranges and standard deviations of implanted ions
- 1 February 1978
- journal article
- Published by Springer Nature in Applied Physics A
- Vol. 15 (2) , 223-228
- https://doi.org/10.1007/bf00928213
Abstract
No abstract availableKeywords
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- Energy Dissipation by Ions in the kev RegionPhysical Review B, 1961