Planar, low-loss optical waveguides fabricated by solid-phase regrowth
- 14 September 1992
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 61 (11) , 1269-1271
- https://doi.org/10.1063/1.107614
Abstract
Planar, low-loss AlGaAs/GaAs waveguides have been fabricated using the solid-phase regrowth (SPR) process. Single-mode waveguide with a propagation loss as low as 1.6 dB/cm have been obtained. This process requires only thin-film deposition and low-temperature short-duration annealing (i.e., 650 °C for 30 s), thus making the SPR method a much simplified technique to induce compositional disordering. Simultaneous electrical isolation and compositional disordering are also demonstrated with the SPR process.Keywords
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