Geometrical strengthening and tip-sharpening of a microneedle array fabricated by X-ray lithography
- 30 May 2006
- journal article
- Published by Springer Nature in Microsystem Technologies
- Vol. 13 (3-4) , 209-214
- https://doi.org/10.1007/s00542-006-0173-4
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Plain-pattern to cross-section transfer (PCT) technique for deep x-ray lithography and applicationsJournal of Micromechanics and Microengineering, 2004
- Microfabricated Polysilicon Microneedles for Minimally Invasive Biomedical DevicesBiomedical Microdevices, 2000