Determination of Young’s Modulus of Porous Low-k Films by Ellipsometric Porosimetry
- 1 January 2002
- journal article
- Published by The Electrochemical Society in Electrochemical and Solid-State Letters
- Vol. 5 (12) , F29
- https://doi.org/10.1149/1.1517771
Abstract
No abstract availableThis publication has 7 references indexed in Scilit:
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