Spatial distribution of excess carriers in electron-beam excited semiconductors
- 1 May 1967
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in Proceedings of the IEEE
- Vol. 55 (5) , 733-734
- https://doi.org/10.1109/PROC.1967.5675
Abstract
The steady-state one-dimensional carrier distribution in depth is computed for electron-beam excitation of semiconductors, including diffusion and surface recombination. An exmple is given for n-type GaAs bombarded by a 29-kV electron beam.Keywords
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