Abstract
This correspondence calculates the average yield\bar{Y_{N}}forNmultiple devices as a function of the average yield (\bar{Y_{1}}) of single devices assuming several simple forms of distribution function for slice yields. It shows that the usual calculation\bar{Y_{N}}= (\bar{Y_{1}})^{N}is too pessmistic by an appreciable factor even when no "within slice" correlation exists. Using an actual distribution of transistor slice yields, the (\bar{Y_{1}})^{N}calculation is shown to give a yield which is a factor of 5 too low for groups of eight good devices.

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