Lead Zirconate Titanate Films Produced by ‘Facing Targets’ RF-Sputtering

This publication has 18 references indexed in Scilit:

• Pulsed laser deposition of barium titanate films on silicon
  Solid State Communications, 1989
• Modulated structure of the superconducting compounds Bi2Sr2Ca n-1Cu n O y withn=1 and 2
  Zeitschrift für Physik B Condensed Matter, 1989
• Preparation of epitaxial Pb(ZrxTi1−x)O3 thin films and their crystallographic, pyroelectric, and ferroelectric properties
  Journal of Applied Physics, 1989
• Effects of deposition conditions on the superconducting properties of r.f. and d.c. magnetron sputter-deposited YBa2Cu3O7−x films
  Thin Solid Films, 1988
• Surface acoustic wave propagation on lead zirconate titanate thin films
  Applied Physics Letters, 1988
• Preparation and basic properties of PbTiO₃ferroelectric thin films and their device applications
  Ferroelectrics, 1985
• Effect of Partially-Ionized Vapor on Epitaxial Growth of Te Thin Films
  Japanese Journal of Applied Physics, 1982
• Ion-beam deposition of thin films of ferroelectric lead zirconate titanate (PZT)
  Journal of Applied Physics, 1979
• Epitaxial growth of ferroelectric PLZT [(Pb, La)(Zr, Ti)O3] thin films
  Journal of Crystal Growth, 1978
• Pb(Zr·Ti)O₃Films by RF Sputtering in PbO Vapour
  Japanese Journal of Applied Physics, 1978