An Improved Ion Thinning Apparatus
- 1 August 1971
- journal article
- research article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 42 (8) , 1177-1184
- https://doi.org/10.1063/1.1685337
Abstract
Details of an improved ion thinning apparatus, suitable for preparing electron microscope foils of inorganic nonmetallic samples (ceramics, minerals, rocks), are described, along with a resume of conditions for its optimum operation. Problems of surface topography and radiation damage associated with the ion thinning process are also briefly discussed.This publication has 15 references indexed in Scilit:
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