A parametric study of the deposition of the TiN thin films by laser reactive ablation of titanium targets in nitrogen: the roles of the total gas pressure and the contaminations with oxides
- 1 June 1996
- journal article
- research article
- Published by Springer Nature in Journal of Materials Science
- Vol. 31 (11) , 2909-2915
- https://doi.org/10.1007/bf00356001
Abstract
No abstract availableKeywords
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