Deposition and annealing of ion beam sputtered Y-Ba-Cu-O superconducting films
- 31 July 1989
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 55 (5) , 501-503
- https://doi.org/10.1063/1.102430
Abstract
Highly oriented, near-stoichiometric films of YBa2Cu3O7−δ have been deposited onto (100) MgO, (100) yttria-stabilized zirconia, and (110) SrTiO3 by ion beam sputtering from a single, off-stoichiometric target. Their crystal structure and resistance behavior were found to depend on the crystallization temperature of a two-step post-deposition anneal, which was varied from 750 to 1000 °C. The highest zero-resistance temperature (73 K) and degree of preferred orientation was observed for a film which was deposited on (100) MgO and annealed for a short time at 950 °C.Keywords
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