Patterned Magnetic Permalloy and Nickel Films: Fabrication by Electron Beam and X-Ray Lithographic Techniques
- 15 August 2002
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 41 (Part 1, No) , 5149-5152
- https://doi.org/10.1143/jjap.41.5149
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