Dose effects of cathodoluminescence in SiO2 layers on Si
- 15 December 1996
- journal article
- Published by Elsevier in Materials Science and Engineering: B
- Vol. 42 (1-3) , 293-296
- https://doi.org/10.1016/s0921-5107(96)01724-2
Abstract
No abstract availableKeywords
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- Cathodoluminescence of Intrinsic Defects in Glassy SiO2, Thermal SiO2 Films, and α-QuartzPhysica Status Solidi (a), 1986
- Cathodoluminescence of SiO2 filmsJournal of Non-Crystalline Solids, 1980
- The Role of Hydrogen in SiO2 Films on SiliconJournal of the Electrochemical Society, 1979
- A study of SiO layers on Si using cathodoluminescence spectraSolid-State Electronics, 1973