DRAM Wafer Qualification Issues: Oxide Integrity vs. D-Defects, Oxygen Precipitates and High Temperature Annealing
- 1 July 1995
- journal article
- Published by Trans Tech Publications, Ltd. in Solid State Phenomena
- Vol. 47-48, 327-352
- https://doi.org/10.4028/www.scientific.net/ssp.47-48.327
Abstract
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