Friction-reducing coatings by dual fast atom beam technique

• 1 November 1986
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology A
• Vol. 4  (6) , 2993-2996
• https://doi.org/10.1116/1.573613

Abstract

Keywords

• FRICTION REDUCING
• REDUCING COATINGS
• DUAL FAST
• ATOM BEAM
• FAST ATOM
• BEAM TECHNIQUE