AVNA-based polarimetric scatterometers

Abstract
The polarization synthesis technique for measuring the scattering properties of point and distributed targets is discussed, and it is pointed out that accurate measurements of both the magnitude and phase of the scattered signal are now possible by using the signal-processing and error-correction techniques of the automatic vector network analyzer (AVNA). The principles of operation of the AVNA are given, and an overview of AVNA-based scatterometer configurations in use today at centimeter and millimeter wavelengths is provided.

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