Preparation of Conductive and Transparent Thin Films by Argon Ion Beam Sputtering of Zinc Oxide in Atmosphere Containing Hydrogen
- 1 December 1994
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 33 (12R)
- https://doi.org/10.1143/jjap.33.6706
Abstract
Conductive and transparent thin films of zinc oxide were prepared by argon ion beam sputtering of a zinc oxide target. The films, deposited at room temperature in an atmosphere containing hydrogen, typically showed the conductivity of 3.8×102/ Ω· cm. An increase of the hydrogen/argon ratio brought about an increase of carrier concentration, which was reflected by an increase of the absorption energy of the optical spectra.Keywords
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